Capacitively coupled microplasma source on a chip at atmospheric pressure

Japanese Journal of Applied Physics, Part 2: Letters

Volumn 40, Issue 4 A, 2001, Pages

  Yoshiki, Hiroyuki ^a   Horiike, Yasuhiro ^b  

^a TSURUOKA NATIONAL COLLEGE OF TECHNOLOGY   (Japan)

^b UNIVERSITY OF TOKYO   (Japan)

Author keywords

13.56 MHz capacitively coupled plasma; Atmospheric pressure; Helium; Microplasma; On chip device

Indexed keywords

ATMOSPHERIC PRESSURE; CAPACITANCE; CAPILLARY TUBES; ELECTRODES; MICROPROCESSOR CHIPS; RESONANCE;

CAPACITIVELY COUPLED MICROPLASMA SOURCES;

PLASMA DISPLAY DEVICES;

EID: 0035302172     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.40.l360     Document Type: Article

References (7)