Fabrication and characterisation of an array of miniaturized electrostatic multipoles

Microelectronic Engineering

Volumn 41-42, Issue , 1998, Pages 489-492

  Gross, H S ^a   Prins, F E ^a   Kern, D P ^a  

^a UNIVERSITY OF TÜBINGEN   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC RESISTANCE; ELECTRON BEAMS; ELECTRON OPTICS; FABRICATION; LITHOGRAPHY;

MINIATURIZED ELECTROSTATIC MULTIPOLES; MULTIPLE ARRAY;

NANOTECHNOLOGY;

EID: 0031683267     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(98)00114-2     Document Type: Article

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