Wet etching for the mitigation of laser damage growth in fused silica

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4932, Issue , 2003, Pages 103-111

  Bouchut, Ph ^a   Garrec, P ^a   Pelle, C ^a  

^a CEA GRENOBLE   (France)

Author keywords

Damage statistics; Laser damage; Mitigation rate; Silica technology

Indexed keywords

ETCHING; FUSED SILICA; SCANNING ELECTRON MICROSCOPY;

ETCHING ANISOTROPY;

LASER DAMAGE;

EID: 0042362025     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.472389     Document Type: Conference Paper

References (14)

1. J.A. Menapace, B Penetrante, D. Golini, Al Slomba, P.E. Miller, T Parham, M. Nichols, J. Peterson "Combined advanced finishing and UV-laser conditioning for producing UV-Damage resistant fused silica optics"; Proceedings SPIE, vol 4679, pp56-67, 2002
2. G.A.C.M. Spierings; "Wet chemical etching of silicate glasses in hydrofluoric acid based solutions" J of Materials Science, 28, pp6261-6273, 1993
3. J.A. Britten, L.J. Summers; "Multiscale, multifunction diffractive structures wet etched into fused silica for high-laser damage threshold application"; Applied Optics, vol 37, no30, pp7049-54, 1998
4. L.W. Hrubesh, M.A. Norton, W.A. Molander, E.E. Donohue, S.M. Maricle, B.M. Penetrante, R.M. Brusasco, W Grundler, J.A. Butler, J.W. Carr, R.M. Hill, L.J. Summers, M.D. Feit, A. Rubenchik, M.H.Key, P.J. Wegner, A.K. Burnham, L.A. Hackel, M.R. Kozlowski; "Methods for mitigating surface damage growth on NIF final optics"; Proceedings SPIE, vol 4679, pp23-33, 2002
5. LW Hrubesh, MA Norton, W;A. Molander, P.J. Wegner, M. Staggs, S.G. Demos, J.A. Britten, L.J. Summers, E.F. Lindsey, M.R. Kozlowski "Chemical etch effects on laser induced surface damage growth in fused silica" Proceedings SPIE, vol 4347, pp553-559, 2001
6. N. Bloembergen; "Role of cracks, pores, and absorbing inclusions on laser induced damage threshold at surfaces of transparent dielectrics" Applied Optics, vol 12 no4, pp661-664, 1973
7. F. Bonneau, P. Combis, J. Rullier, J. Vierne, A. Pujols, M. Seques; "Numerical simulations of laser-defect induced absorption in SiO2"; Published in these proceedings; 2003
8. M.D. Crisp, N.L. Boling, G. Dubé; "Importance of Fresnel reflections in laser surface damage of transparent dielectrics"; Appl. Phys. Lett., vol 21, no 8, pp364-366, 1972
9. M. Affigato, D.H. Osborne, R.F. Haglund Jr; "Effect of surface roughness on the acid etching of amorphous silica"; J. Am.Ceram.Soc., 79[3], pp688-94, 1996
10. F. Bonneau, P. Combis, J. Rullier, J. Vierne, L. Gallais, J. Natoli, H. Bercegol, L Lamaignere, P. Bouchut; "Comparison of numerical simulations with experiment on generation of craters in silica by a laser"; Published in these proceedings; 2003
11. J Hue, J. Dijon, G; Ravel, P. Lyan, P. Garrec, T. Lanternier, M. Olivier, A. Lagrange; "Automatic YAG damage test benches: additional possibilities", SPIE vol 3578, pp290-301, 1999
12. J Yoshiyama, F.Y. Génin, A Salleo, I. Thomas, M.R Kozlowski, L; M. Sheehan, I.D Hutcheon, D.W Camp "A study of the effects of polishing, etching, cleaving, and water leaching on the UV laser damage of fused silica"; Proceedings SPIE, vol 3244, pp331-340, 1998
13. T Diepold, E Obermeier; "Smoothing of ultrasonically drilled holes in borosilicate glass by wet chemical etching"; J.Micromech. Microeng., 6, pp29-32, 1996
14. 2 laser treatment for mitigation of 351 nm damage growth on fused silica"; Proceedings SPIE, vol 4679, pp40-47, 2002