Microfrictional properties of diamond-like carbon films sliding against silicon, sapphire and steel

Wear

Volumn 254, Issue 11, 2003, Pages 1076-1083

  Ahmed, S I U ^a   Bregliozzi, G ^a   Haefke, H ^a  

^a CSEM   (Switzerland)

Author keywords

Diamond like carbon (DLC); Microfriction; Microtribology; Surface roughness

Indexed keywords

COMPOSITION; FRICTION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SAPPHIRE; SILICON; STEEL;

SLIDING VELOCITY;

DIAMOND LIKE CARBON FILMS;

DIAMOND-LIKE CARBON; DIAMOND-LIKE COATING; FRICTION; SAPPHIRE; SILICON; SLIDING WEAR; STEEL;

EID: 0042355203     PISSN: 00431648     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0043-1648(03)00339-9     Document Type: Article

References (36)

1. J.C. Angus, P. Koidl, S. Domitz, Carbon thin films, in: J. Mort, F. Jansen (Eds.), Plasma Deposition of Thin Films, vol. 4, CRC Press, Boca Raton, FL, 1986, pp. 89-127.
2. Koskinen J.Ehrnstén U.Mahiout A.Lahtinen R.Hirvonen J.-P.Hannula S.-P.Porosity of thin diamond-like carbon films deposited by an arc discharge method Surf. Coat. Technol. 62 1993 356-360
3. Allen M.J.Law F.C.Rushton N.The effects of diamond-like carbon coatings on macrophages, fibroblasts and osteoblast-like cells Clin. Mater. 17 1994 1-10
4. McColl R.I.Grant D.M.Green S.M.Wood J.V.Parker T.L.Parker K.Goruppa A.A.Braithwaite N.St.J.Low temperature plasma-assisted chemical vapour deposition of amorphous carbon films for biomedical-polymeric substrates Diamond Relat. Mater. 3 1993 83-87
5. K. Holmberg, A. Matthews, Coatings tribology, in: Tribology Series, vol. 28, Elsevier, Amsterdam, 1994, p. 213.
6. Donnet C.Le Mogne T.Posonnet L.Belin M.Grill A.Patel V.Jahnes C.The respective role of oxygen and water vapor on the tribology of hydrogenated diamond-like carbon coatings Tribol. Lett. 4 1998 259-265
7. Grill A.Tribology of diamondlike carbon and related materials: an updated review Surf. Coat. Technol. 94-95 1997 507-513
8. Voevodin A.A.Zabinski J.S.Superhard, functionally gradient, nanolayered and nanocomposite diamond-like carbon coatings for wear protection Diamond Relat. Mater. 7 1998 463-467
9. Matthews A.Eskildsen S.S.Engineering applications for diamond-like carbon Diamond Relat. Mater. 3 1994 902-911
10. Lettington A.H.Applications of diamond-like carbon thin films Carbon 36 1998 555-560
11. Gupta B.K.Bhushan B.Mechanical and tribological properties of hard carbon coatings for magnetic recording heads Wear 190 1995 110-122
12. Lifshitz Y.Diamond-like carbon-present status Diamond Relat. Mater. 8 1998 1659-1676
13. W. Ehrfeld, U. Ehrfeld, St. Kiesewalter, Progress and Profit through Microtechnologies, in: Micro.Tec 2000: Applications, Trends, vol. 1, Visionen, Berlin, 2000, pp. 9-17.
14. Grill A.Review of the tribology of diamond-like carbon Wear 168 1993 143-153
15. Y. Gerbig, K. Vercammen, J. Meneve, H. Haefke, Reibung und Verschleiss von state-of-the-art-DLC-Schichten, in: Proceedings of the GfT-Tribologie-Fachtagung "Reibung, Schmierung und Verschleiss", Göttingen, Germany, 2000, pp. 27/1-9.
16. Meneve J.Havermans D.Vercammen K.Haefke H.Gerbig Y.Pflüger E.Mechanical properties and tribological behaviour of state-of-the-art diamond-like carbon coatings Adv. Eng. Mater. 3 2001 163-166
17. Vercammen K.Haefke H.Gerbig Y.Van Hulsel A.Pflüger E.Meneve J.A comparative study of state-of-the-art diamond-like carbon films Surf. Coat. Technol. 133-134 2000 466-472
18. Maboudian R.Surface processes in MEMS technology Surf. Sci. Rep. 30 1998 207-269
19. Mate C.M.Nanotribology studies of carbon surfaces by force microscopy Wear 168 1993 17-20
20. Mate C.M.Nanotribology of lubricated and unlubricated carbon overcoats on magnetic disks studied by friction force microscopy Surf. Coat. Technol. 62 1993 373-379
21. Riedo E.Chevrier J.Comin F.Brune H.Nanotribology of carbon based thin films: the influence of film structure and surface morphology Surf. Sci. 477 2001 25-34
22. Perry S.S.Somorjai G.A.Mate C.M.White R.L.Adhesion and friction properties of hydrogenated amorphous carbon films measured by atomic force microscopy Tribol. Lett. 1 1995 233-246
23. Fang T.-H.Weng C.-I.Chang J.-G.Hwang C.-C.Nanotribology of amorphous hydrogenated carbon films using scanning probe microscopy Thin Solid Films 396 2001 166-172
24. Bhushan B.Dandavate C.Thin-film friction and adhesion studies using atomic force microscopy J. Appl. Phys. 87 2000 1201-1210
25. Liu H.Ahmed S.I.-U.Scherge M.Microtribological properties of silicon and silicon coated with diamond like carbon, octadecyltrichlorosilane and stearic acid cadmium salt films: a comparative study Thin Solid Films 381 2001 135-142
26. Scherge M.Li X.Schaefer J.A.The effect of water on friction of MEMS Tribol. Lett. 6 1999 215-220
27. M. Scherge, S.N. Gorb, Biological Micro and Nanotribology, NanoScience and Technology, Springer-Verlag, Berlin, 2001.
28. S.I. Ahmed, M. Scherge, X. Li, J.A. Schaefer, Microtribological properties of self assembled monolayers, in: Proceedings of the GfT-Tribologie-Fachtagung "Reibung, Schmierung und Verschleiss", Göttingen, Germany, 1999, pp. 9/1-8.
29. S.I.-U. Ahmed, M. Scherge, A. Opitz, J.A. Schaefer, submitted.
30. Scherge M.Ahmed S.I.Mollenhauer O.Spiller F.Detection of microNewton forces in tribology Technisches Messen 67 2000 324-327
31. Ronkainen H.Koskinen J.Likonen J.Varjus S.Vihersalo J.Characterization of wear surfaces in dry sliding of steel and alumina on hydrogenated and hydrogen-free carbon films Diamond Relat. Mater. 3 1994 1329-1336
32. Ronkainen H.Varjus S.Holmberg K.Friction and wear properties in dry, water- and oil-lubricated DLC against alumina and DLC against steel contacts Wear 222 1998 120-128
33. Butter R.S.Waterman D.R.Lettington A.H.Ramos R.T.Fordham E.J.P Production and wetting properties of fluorinated diamond-like carbon coatings Thin Solid Films 311 1997 107-113
34. Erdemir A.Nilufer I.B.Eryilmaz O.L.Beschliesser M.Fenske G.R.Friction and wear performance of diamond-like carbon films grown in various source gas plasmas Surf. Coat. Technol. 120-121 1999 589-593
35. Nevshupa R.A.Scherge M.Ahmed S.I.-U.Transitional microfriction behavior of silicon induced by spontaneous water adsorption Surf. Sci. 517 2002 17-28
36. E. Riedo, F. Lévy, H. Brune, Kinetics of capillarity condensation in nanoscopic sliding friction, Phys. Rev. Lett. 88 (2002) 185505-1/4.