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Volumn 396, Issue 1-2, 2001, Pages 167-173

Nanotribology of amorphous hydrogenated carbon films using scanning probe microscopy

(4) Fang, Te Hua a Weng, Cheng I a Chang, Jee Gong a Hwang, Chi Chuan a

a NATIONAL CHENG KUNG UNIVERSITY (Taiwan)

Author keywords

a C:H films; Electron cyclotron resonance microwave plasma chemical vapor deposition (ECR MPCVD); Nanotribology; Scanning probe microscopy

Indexed keywords

AMORPHOUS FILMS; ELECTRON CYCLOTRON RESONANCE; FRICTION; HYDROGENATION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SILICON; SUBSTRATES; TRIBOLOGY; WEAR OF MATERIALS;

SCANNING PROBE MICROSCOPY;

DIAMOND LIKE CARBON FILMS;

EID: 0035929018 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/s0040-6090(01)01180-4 Document Type: Article

Times cited : (6)

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