New fully integrated 3-D silicon Hall sensor for precise angular-position measurements

Sensors and Actuators, A: Physical

Volumn 67, Issue 1-3, 1998, Pages 72-76

  Burger, F ^a   Besse, P A ^a   Popovic, R S ^a  

^a EPFL   (Switzerland)

Author keywords

Angular position; Compensation; Integrated Hall sensors; Magnetometers

Indexed keywords

HALL EFFECT TRANSDUCERS; MAGNETIC FIELD MEASUREMENT; MAGNETOMETERS; SENSORS;

INTEGRATED HALL SENSORS;

HALL EFFECT DEVICES;

EID: 0042351313     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(97)01750-0     Document Type: Article

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