Effects of a low-energy ion beam on the growth of titanium nitride layers near the interface of a polyimide

Applied Physics Letters

Volumn 74, Issue 22, 1999, Pages 3293-3295

  Abramowitz, Peter ^a   Kiene, Michael ^a,b   Ho, Paul S ^a,b  

^a UNIVERSITY OF TEXAS AT AUSTIN   (United States)

^b The University of Texas at Austin   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0042208812     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.123322     Document Type: Article

References (17)

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