Characterization of thin, transparent and conductive TiN films prepared by radio frequency sputtering

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 16, Issue 1, 1998, Pages 200-202

  Kawamura, Midori ^a   Abe, Yoshio ^a   Sasaki, Katsutaka ^a  

^a KITAMI INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0032331386     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.580970     Document Type: Article

References (14)

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