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Analytical and Bioanalytical Chemistry

Volumn 375, Issue 1, 2003, Pages 47-52

Analytical characterization of thin carbon films

(8) Ohr, R a Schug, C a Wahl, M a Wienss, A a Hilgers, H a Mahrholz, J b Willich, P b Jung, T b

a IBM (Germany)

b FRAUNHOFER INSTITUTE FOR SURFACE ENGINEERING AND THIN FILMS IST (Germany)

Author keywords

Areal storage density; Carbon overcoat; Thickness determination; Thin film analysis; X ray reflectivity (XRR)

Indexed keywords

CARBON; CATHODES; CHARACTERIZATION; CHEMICAL ANALYSIS; CHEMICAL BONDS; DEPOSITION; RAMAN SPECTROSCOPY;

AERAL STORAGE DENSITY; CARBON OVERCOAT; THICKNESS DETERMINATION; THIN-FILM ANALYSIS; X-RAY REFLECTIVITY (XRR);

THIN FILMS;

ARTICLE;

EID: 0042129625 PISSN: 16182642 EISSN: None Source Type: Journal
DOI: 10.1007/s00216-002-1667-2 Document Type: Article

Times cited : (6)

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