SCOPUS 정보 검색 플랫폼

Solid-State Electronics

Volumn 47, Issue 10, 2003, Pages 1607-1611

The Pr2O3/Si(0 0 1) interface studied by synchrotron radiation photo-electron spectroscopy

(2) Schmeisser D a Mussig H J b

a BRANDENBURG UNIVERSITY OF TECHNOLOGY (Germany)

b IHP (Germany)

Author keywords

High k dielectric material; Interface; Pr2O3; Silicate

Indexed keywords

CMOS INTEGRATED CIRCUITS; DEPTH INDICATORS; DIELECTRIC MATERIALS; GATES (TRANSISTOR); INTERFACES (MATERIALS); MOLECULAR BEAM EPITAXY; PHOTOELECTRON SPECTROSCOPY; ULTRAHIGH VACUUM;

GATE DIELECTRICS;

PRASEODYMIUM COMPOUNDS;

EID: 0042093591 PISSN: 00381101 EISSN: None Source Type: Journal
DOI: 10.1016/S0038-1101(03)00178-3 Document Type: Conference Paper

Times cited : (12)

References (14)

1
- 0004245602
- International Technology Roadmap for Semiconductors, ITRS-2001.
- (2001) International Technology Roadmap for Semiconductors, ITRS-2001

2
- 0037140021
- Müssig H.-J., Dabrowski J., Ignatovich K., Liu J.P., Zavodinsky V., Osten H.J. Surf. Sci. 504:2002;159.
- (2002) Surf. Sci. , vol.504 , pp. 159
- Müssig, H.-J.¹ Dabrowski, J.² Ignatovich, K.³ Liu, J.P.⁴ Zavodinsky, V.⁵ Osten, H.J.⁶

3
- 0034453546
- Osten H.J., Liu J.P., Gaworzewski P., Bugiel E., Zaumseil P. IEDM Techn. Digest. 2000;653.
- (2000) IEDM Techn. Digest , pp. 653
- Osten, H.J.¹ Liu, J.P.² Gaworzewski, P.³ Bugiel, E.⁴ Zaumseil, P.⁵

4
- 0035568121
- USA
- Müssig H-J, Osten HJ, Bugiel E, Dabrowski J, Fissel A, Guminskaja T, et al. IEEE International Integrated Reliability Workshop - Final Report, USA; 2001. pp. 1.
- (2001) IEEE International Integrated Reliability Workshop - Final Report , pp. 1
- Müssig, H.-J.¹ Osten, H.J.² Bugiel, E.³ Dabrowski, J.⁴ Fissel, A.⁵ Guminskaja, T.⁶

5
- 30544439683
- Swartzentruber B.S., Mo Y.-W., Webb M.B., Lagally M.G. J. Vac. Sci. Technol. A. 7:1989;2901.
- (1989) J. Vac. Sci. Technol. A , vol.7 , pp. 2901
- Swartzentruber, B.S.¹ Mo, Y.-W.² Webb, M.B.³ Lagally, M.G.⁴

6
- 0035928275
- Batchelor D.R., Follath R., Schmeißer D. Nucl. Instrum. Methods Phys. Res. A. 467-468:2001;470.
- (2001) Nucl. Instrum. Methods Phys. Res. A , vol.467-468 , pp. 470
- Batchelor, D.R.¹ Follath, R.² Schmeißer, D.³

7
- 4243656713
- Electronic and Optical Materials, accepted
- Schmeißer D, Dabrowski J, Müssig H-J. 2003 MRS Spring Meeting Proceedings, Symposium D (Electronic and Optical Materials), accepted.
- 2003 MRS Spring Meeting Proceedings, Symposium D
- Schmeißer, D.¹ Dabrowski, J.² Müssig, H.-J.³

8
- 4243441815
- Proceedings of the 3rd international meeting "challenges in predictive process simulation - ChiPPS 2002"
- Schmeißer D. Proceedings of the 3rd International Meeting "Challenges in Predictive Process Simulation - ChiPPS 2002", in Materials Science in Semiconductor Processing (2003).
- (2003) Materials Science in Semiconductor Processing
- Schmeißer, D.¹

9
- 4243675913
- Lütkehoff S., Neumann M., Slebarski A. Phys. Rev. B. 52:1995;13808.
- (1995) Phys. Rev. B , vol.52 , pp. 13808
- Lütkehoff, S.¹ Neumann, M.² Slebarski, A.³

10
- 4243245473
- submitted
- Schmeißer D, Dabrowski J, Müssig H-J. Appl Phys Lett, submitted.
- Appl Phys Lett
- Schmeißer, D.¹ Dabrowski, J.² Müssig, H.-J.³

11
- 0036606978
- Fissel A., Dabrowski J., Osten H.J. J. Appl. Phys. 91:2002;8986.
- (2002) J. Appl. Phys. , vol.91 , pp. 8986
- Fissel, A.¹ Dabrowski, J.² Osten, H.J.³

12
- 0036501118
- Misra V., Lucovsky G., Parsone G. MRS Bull. March:2002;212.
- (2002) MRS Bull. , vol.MARCH , pp. 212
- Misra, V.¹ Lucovsky, G.² Parsone, G.³

13
- 0000695905
- Ogasawara H., Kotani A., Potze R., Sawatzky G.A., Thole B.T. Phys. Rev. B. 44:1991;5465.
- (1991) Phys. Rev. B , vol.44 , pp. 5465
- Ogasawara, H.¹ Kotani, A.² Potze, R.³ Sawatzky, G.A.⁴ Thole, B.T.⁵

14
- 3242741763
- Subshell photoionisation cross-sections
- Yeh J.J., Lindau I. Subshell photoionisation cross-sections. At. Data Nucl. Data Tables. 1985;32.
- (1985) At. Data Nucl. Data Tables , pp. 32
- Yeh, J.J.¹ Lindau, I.²

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