SCOPUS 정보 검색 플랫폼

Volumn 504, Issue , 2002, Pages 159-166

Initial stages of praseodymium oxide film formation on Si(001)

(6) Mussig H J a Dabrowski, J a Ignatovich, K a,b Liu, J P a Zavodinsky, V a,b Osten, H J a

b INSTITUTE OF BIOLOGY AND SOIL SCIENCE (Russian Federation)

Author keywords

Ab initio quantum chemical methods and calculations; Auger electron spectroscopy; Growth; Scanning tunneling microscopy; Silicon; X ray photoelectron spectroscopy

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; CMOS INTEGRATED CIRCUITS; CRYSTAL GROWTH; DIELECTRIC MATERIALS; MONOLAYERS; PERMITTIVITY; PRASEODYMIUM; SCANNING TUNNELING MICROSCOPY; SEMICONDUCTING SILICON; SILICA; SUBSTRATES; X RAY PHOTOELECTRON SPECTROSCOPY;

OXIDE FILMS;

METALLIC FILMS;

EID: 0037140021 PISSN: 00396028 EISSN: None Source Type: Journal
DOI: 10.1016/S0039-6028(01)01961-6 Document Type: Article

Times cited : (36)

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