Comprehensive understanding of electron and hole mobility limited by surface roughness scattering in pure oxides and oxynitrides based on correlation function of surface roughness

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 41, Issue 4 B, 2002, Pages 2353-2358

  Ishihara, Takamitsu ^a   Matsuzawa, Kazuya ^a   Takayanagi, Mariko ^a   Takagi, Shin Ichi ^a  

^a TOSHIBA CORPORATION   (Japan)

Author keywords

Oxynitride; Roughness correlation function; Surface roughness

Indexed keywords

CORRELATION METHODS; OXIDES; SCATTERING; SURFACE ROUGHNESS;

HIGH FIELD MOBILITY; OXYNITRIDE; ROUGHNESS CORRELATION FUNCTION;

HOLE MOBILITY;

EID: 0042059230     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/JJAP.41.2353     Document Type: Article

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