Surface oxide effects on static fatigue of polysilicon MEMS

Materials Research Society Symposium - Proceedings

Volumn 741, Issue , 2002, Pages 41-46

  Kahn, H ^a   Ballarini, R ^a   Heuer, A H ^a  

^a Case Western Reserve University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CRACK PROPAGATION; FATIGUE OF MATERIALS; FRACTURE; MICROACTUATORS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; RESIDUAL STRESSES; SILICA; STRESS CONCENTRATION; STRESS CORROSION CRACKING; STRESS INTENSITY FACTORS; TENSILE STRESS;

CATASTROPHIC CRACK PROPAGATION; ELECTROSTATIC COMB MICROACTUATOR; STATIC FATIGUE; SURFACE MICROMACHINING; SURFACE OXIDE EFFECTS;

POLYSILICON;

EID: 0042009836     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-741-j3.4     Document Type: Conference Paper

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