High quality YBa2Cu3O7-δ Josephson junctions and junction arrays fabricated by masked proton beam irradiation damage

IEEE Transactions on Applied Superconductivity

Volumn 13, Issue 2 I, 2003, Pages 889-892

  Peng, Nianhua ^a   Kang, Dae Joon ^b   Jeynes, Chris ^a   Webb, Roger P ^a   Moore, David F ^b   Blamire, Mark G ^b   Chakarov, Ivan R ^c  

^a UNIVERSITY OF SURREY   (United Kingdom)

^b UNIVERSITY OF CAMBRIDGE   (United Kingdom)

^c Silvaco Data Systems Inc   (United States)

Author keywords

Ion irradiation damage; Josephson junction; MID; Monte Carlo simulation; YBCO

Indexed keywords

ION BEAMS; MASKS; PROTON IRRADIATION; YTTRIUM BARIUM COPPER OXIDES;

IRRADIATION DAMAGE;

JOSEPHSON JUNCTION DEVICES;

EID: 0041975819     PISSN: 10518223     EISSN: None     Source Type: Journal    
DOI: 10.1109/TASC.2003.814070     Document Type: Conference Paper

References (19)

1. c Josephson junctions," Physica C, vol. 209, no. 211, 1993.
2. 7-δ by a high brightness electron source," Appl. Phys. Lett, vol. 68, no. 3811, 1996.
3. A. J. Pauza, W. E. Booij, K. Hermann, D. F. Moore, M. G. Blamire, D. A. Rudman, and L. R. Vale, "Electron beam damaged high temperature superconductor Josephson junctions," J. Appl. Phys., vol. 82, no. 11, pp. 5612-5632, December 1997.
4. c Josephson junctions produced by focused electron beam irradiation," Phys. Rev. B, vol. 55, no. 21, pp. 14 600-14 609, June 1997.
5. 7-δ," Appl. Phys. Lett., vol. 73, no. 2354, 1998.
6. C. H. Chen, I. Jin, S. P. Pei, Z. W. Dong, R. P. Sharma, C. J. Lobb, T. Venkatesan, K. Edinger, J. Ortoff, J. Melngailis, Z. Zhang, and W. K. Chu, "Combined method of focused ion beam milling and ion implantation techniques for the fabrication of high temperature superconductor Josephson junctions," J. Vac. Sc. Technol. B, vol. 16, no. 2898, 1998.
7. 7-δ weak links prepared by local oxygen-ion induced modification," Physica C, vol. 256, no. 191, 1996.
8. A. S. Katz, S. I. Woods, and R. C. Dynes, "Transport properties of high Tc planar Josephson junctions fabricated nanolithography and ion implantation," J. Appl. Phys., vol. 87, no. 2978, 2000.
9. 7-δ using metal masks," in Applied Superconductivity 1999, X. Obradors, F. Sandiumenge, and J. Fontcuberta, Eds. Bristol: IOP Publishing, 2000.
10. 7-δ thin films through high aspect ratio Nb masks," Nucl. Instrum. Methods, vol. B164, pp. 979-985, April 2000.
11. 7-δ thin films," Nucl. Instrum. Methods, vol. B178, pp. 242-246, May 2001.
12. 7-δ thin films with Au masks," Nucl. Instrum. Methods, vol. B188, pp. 189-195, April 2002.
13. 7-δ thin films by Monte Carlo simulation," Physica C.
14. 7-δ," IEEE Transactions on Applied Superconductivity, pt. 1, vol. 11, no. 1, pp. 780-783, March 2001.
15. 7-δ Josephson junctions by masked ion damage technique," Appl. Phys. Lett., vol. 80, no. 5, pp. 814-816, February 2002.
16. D. J. Kang, N. H. Peng, R. Webb, C. Jeynes, G. Burnell, J. H. Yun, S. H. Moon, B. Oh, E. J. Tarte, D. F. Moore, M. Kelly, and M. G. Blamire, "Irradiation damage technology for manufacturable Josephson junctions," Nucl. Instrum. Methods, vol. B188, pp. 183-188, April 2002.
17. A. Latif, W. E. Booij, J. H. Durrell, and M. G. Blamire, "In-situ resistivity monitoring as an end-point detection technique in focused ion beam fabrication," J. Vac. Sci. Technol., vol. B18, no. 2, pp. 761-764, March-April 2000.
18. I. R. Chakarov and R. P. Webb, "Crystal - Binary collision simulation of atomic collisions and dynamic damage buildup in crystalline silicon," Radiation Effects and Defects in Solids, vol. 130-133, pp. 447-452, 1994.
19. J. P. Biersack and L. G. Haggmark, "A Monte Carlo computer program for the transport of energetic ions in amorphous targets," Nucl. Instrum. Methods, vol. 174, p. 257, 1980.