2D Monte Carlo simulation of proton implantation of superconducting YBa2Cu3O7-δ thin films through high aspect ratio Nb masks

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 164, Issue , 2000, Pages 979-985

  Peng, Nianhua ^a   Chakarov, Ivan ^b   Jeynes, Chris ^a   Webb, Roger ^a   Booij, Wilfred ^c   Blamire, Mark ^c   Kelly, Michael ^a  

^a School of Engineering   (United Kingdom)

^b Silvaco Data Systems Inc   (United States)

^c UNIVERSITY OF CAMBRIDGE   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; LANTHANUM COMPOUNDS; MASKS; MONTE CARLO METHODS; NIOBIUM; OXIDE SUPERCONDUCTORS; PERTURBATION TECHNIQUES; SUPERCONDUCTING FILMS; YTTRIUM BARIUM COPPER OXIDES;

PROTON BEAM DAMAGE;

PROTON IRRADIATION;

EID: 0033743182     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(99)01194-5     Document Type: Article

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