Combined method of focused ion beam milling and ion implantation techniques for the fabrication of high temperature superconductor Joseohson junctions

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 16, Issue 5, 1998, Pages 2898-2901

  Chen, C H ^a   Jin, I ^a   Pai, S P ^a   Dong, Z W ^a   Sharma, R P ^a   Lobb, C J ^a   Venkatesan, T ^a,c   Edinger, K ^a   Orloff, J ^a   Melngailis, J ^a   Zhang, Z ^b   Chu, W K ^b  

^a UNIVERSITY OF MARYLAND   (United States)

^b UNIVERSITY OF HOUSTON   (United States)

^c UNIVERSITY OF MARYLAND   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0042255229     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (12)

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