Absolute distance measurements using FTPSI with a widely tunable IR laser

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4778, Issue , 2002, Pages 218-226

  Deck, Leslie L ^a  

^a ZYGO CORPORATION   (United States)

Author keywords

FTPSI; Interferometry; Laser radar; Metrology

Indexed keywords

FOURIER TRANSFORMS; INTERFEROMETERS; PHASE SHIFT; REFRACTIVE INDEX; SEMICONDUCTOR LASERS; WAVEFRONTS;

FOURIER TRANSFORM PHASE-SHIFT INTERFEROMETERY (FTPSI);

OPTICAL RADAR;

EID: 0036425815     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.473544     Document Type: Conference Paper

References (11)

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