Large flat panel profiler

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2862, Issue , 1996, Pages 163-171

  Freischlad, Klaus ^a  

^a Phase Shift Technology   (United States)

Author keywords

Flat panel displays; Flatness; Optical profiler

Indexed keywords

SUBSTRATES; SURFACE ROUGHNESS;

DYNAMIC RANGE; FLATNESS; GLOBAL SHAPES; OPTICAL PROFILER; PHASE-SHIFTING; SPATIAL FREQUENCY; SUBSTRATE SURFACE; SURFACE DEVIATIONS;

FLAT PANEL DISPLAYS;

EID: 0002616284     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.256200     Document Type: Conference Paper

References (5)

1. Surface texture, ANSI/ASME B46.1-1985, The American Society of Mechanical Engineers, New York 1985.
2. K. Freischlad, "Low coherence interferometer for testing thin flat glass", SPIE-conference 2545, 1995.
3. W. H. Steel, Interferometry, Cambridge University Press, Cambridge 1967.
4. H. H. Hopkins, "The Theory of Coherence and its Applications", in Advanced Optical Techniques, A. C. S. van Heel ed., North Holland Publishing Co., Amsterdam 1967.
5. Born and Wolf, Principles of Optics, Pergamon Press, Oxford 1975.