State of the art of fine patterned Si TFT

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5004, Issue , 2003, Pages 144-149

  Noguchi, Takashi ^a  

^a Sungkyunkwan University   (South Korea)

Author keywords

ELC; LCD; OLED; Si; SOP; SPC; TFT

Indexed keywords

ANISOTROPY; CARRIER MOBILITY; CRYSTALLIZATION; EXCIMER LASERS; GLASS; GRAIN SIZE AND SHAPE; LIQUID CRYSTAL DISPLAYS; NUCLEATION; POLYSILICON;

SYSTEM ON PANEL (SOP);

THIN FILM TRANSISTORS;

EID: 0041859658     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.482573     Document Type: Conference Paper

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