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Journal of Materials Science Letters

Volumn 22, Issue 15, 2003, Pages 1117-1118

Low temperature growth of ZnO thin film on Si(100) substrates by metal organic chemical vapor deposition

(3) Kim, Hyoun Woo a Kim, Kwang Sik a Lee, Chongmu a

a Inha University (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

GROWTH (MATERIALS); METALLORGANIC CHEMICAL VAPOR DEPOSITION; OPTOELECTRONIC DEVICES; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTING SILICON; TEMPERATURE; X RAY DIFFRACTION ANALYSIS; ZINC OXIDE;

FULL WIDTH AT HALF MAXIMUM; GAS PHASE REACTION; LOW TEMPERATURE GROWTH;

THIN FILMS;

EID: 0041821701 PISSN: 02618028 EISSN: None Source Type: Journal
DOI: 10.1023/A:1024955412422 Document Type: Article

Times cited : (15)

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