Formation of fine near-field scanning optical microscopy tips. Part I. By static and dynamic chemical etching

Review of Scientific Instruments

Volumn 74, Issue 8, 2003, Pages 3679-3683

  Lazarev, Alexander ^a   Fang, Nicholas ^a   Luo, Qi ^a   Zhang, Xiang ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAMERAS; CHARGE COUPLED DEVICES; ETCHING; OPTICAL FIBERS; PROBES; SEMICONDUCTOR DEVICE MANUFACTURE;

DYNAMIC CHEMICAL ETCHING;

NEAR FIELD SCANNING OPTICAL MICROSCOPY;

EID: 0041677609     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1589583     Document Type: Article

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