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Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 21, Issue 4, 2003, Pages 1355-1358

Role of carbon in boron suboxide thin films

(8) Music, Denis a Kugler, Veronika M a Czigány, Zsolt a Flink, Axel a Werner, Oskar a Schneider, Jochen M b Hultman, Lars a Helmersson, Ulf a

a LINKÖPING UNIVERSITY (Sweden)

b RWTH AACHEN UNIVERSITY (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ACETONE; AMORPHOUS FILMS; CARBON; ELECTRIC CONDUCTIVITY OF SOLIDS; MAGNETRON SPUTTERING; MECHANICAL PROPERTIES; SEMICONDUCTING BORON; SEMICONDUCTING SILICON; SUBSTRATES; ULTRASONIC CLEANING; VACUUM APPLICATIONS; X RAY PHOTOELECTRON SPECTROSCOPY;

BORON SUBOXIDE THIN FILM; RADIO FREQUENCY DUAL MAGNETRON SPUTTERING; ULTRAHIGH VACUUM SYSTEM;

THIN FILMS;

EID: 0041528513 PISSN: 07342101 EISSN: None Source Type: Journal
DOI: 10.1116/1.1560715 Document Type: Article

Times cited : (11)

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