Synthesis and mechanical properties of boron suboxide thin films

Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films

Volumn 20, Issue 2, 2002, Pages 335-337

  Music, Denis ^a   Schneider, Jochen M ^a   Kugler, Veronika ^a   Nakao, Setsuo ^b   Jin, Ping ^b   Östblom, Mattias ^a   Hultman, Lars ^a   Helmersson, Ulf ^a  

^a LINKÖPING UNIVERSITY   (Sweden)

^b NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS FILMS; BORON COMPOUNDS; CRYSTAL IMPURITIES; CRYSTAL MICROSTRUCTURE; ELASTIC MODULI; FOURIER TRANSFORM INFRARED SPECTROSCOPY; GRAPHITE; INORGANIC ACIDS; MAGNETRON SPUTTERING; PARTIAL PRESSURE; SEMICONDUCTING SILICON; SPUTTER DEPOSITION; SURFACE REACTIONS; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

ELASTIC RECOIL DETECTION ANALYSIS;

THIN FILMS;

EID: 0036494098     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1434967     Document Type: Article

References (7)