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Journal of Applied Physics

Volumn 93, Issue 2, 2003, Pages 940-944

Elastic modulus of amorphous boron suboxide thin films studied by theoretical and experimental methods

(5) Music, Denis a Kreissig, Ulrich b Chirita, Valeriu a Schneider, Jochen M c Helmersson, Ulf a

a LINKÖPING UNIVERSITY (Sweden)

b INSTITUTE OF ION BEAM PHYSICS AND MATERIALS RESEARCH (Germany)

c RWTH AACHEN UNIVERSITY (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS FILMS; AMORPHOUS MATERIALS; BORON; COMPOSITION; COMPUTER SIMULATION; ELASTIC MODULI; HYDROGEN BONDS; MAGNETRON SPUTTERING; MOLECULAR DYNAMICS; X RAY DIFFRACTION ANALYSIS;

ELASTIC RECOIL DETECTION ANALYSIS;

THIN FILMS;

EID: 0037439404 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.1531811 Document Type: Article

Times cited : (20)

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