Elastic modulus-density relationship for amorphous boron suboxide thin films

Applied Physics A: Materials Science and Processing

Volumn 76, Issue 2, 2003, Pages 269-271

  Music, Denmu ^a   Kreissig, U ^b   Czigany Zs ^a   Helmersson, U ^a   Schneider, J M ^a,c  

^a LINKÖPING UNIVERSITY   (Sweden)

^b INSTITUTE OF ION BEAM PHYSICS AND MATERIALS RESEARCH   (Germany)

^c RWTH AACHEN UNIVERSITY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS MATERIALS; COMPOSITION; ELASTIC MODULI; MAGNETRON SPUTTERING; SUBSTRATES; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY; X RAY ANALYSIS;

FILM STRUCTURE;

BORON COMPOUNDS;

EID: 18744397842     PISSN: 09478396     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00339-002-1474-9     Document Type: Article

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