Preparation of Cu1-xTax films and the material interaction in the Si/Cu1-xTax/Cu structure

Materials Chemistry and Physics

Volumn 82, Issue 2, 2003, Pages 306-315

  Lin, Chien Tai ^a   Lin, Kwang Lung ^a  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

Author keywords

Amorphous; Cu 3Si; Diffusion barrier; Material interactions; Sputter; Ta

Indexed keywords

AMORPHOUS MATERIALS; ANNEALING; COPPER COMPOUNDS; MAGNETRON SPUTTERING; MICROSTRUCTURE; NUCLEATION; SILICON;

DIFFUSION BARRIERS;

THIN FILMS;

EID: 0041509015     PISSN: 02540584     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0254-0584(03)00219-0     Document Type: Article

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