The nanostructure evolution during and after magnetron deposition of Au films

Thin Solid Films

Volumn 441, Issue 1-2, 2003, Pages 96-103

  Schell, N ^a   Jensen, T ^b   Petersen, J H ^b   Andreasen, K P ^b   Bottiger J ^b   Chevallier, J ^b  

^a INSTITUTE OF ION BEAM PHYSICS AND MATERIALS RESEARCH   (Germany)

^b AARHUS UNIVERSITY   (Denmark)

Author keywords

Growth; In situ X ray diffraction; Magnetron sputtering; Nanocrystalline Au; Nanostructure

Indexed keywords

ANNEALING; FILM GROWTH; GOLD; GRAIN GROWTH; GRAIN SIZE AND SHAPE; MAGNETRON SPUTTERING; NANOSTRUCTURED MATERIALS; SYNCHROTRON RADIATION; TEXTURES; X RAY DIFFRACTION ANALYSIS;

NANOSTRUCTURE EVOLUTION;

THIN FILMS;

EID: 0041418455     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(03)00928-3     Document Type: Article

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