Hillock-free aluminum-based alloy interconnections for active-matrix liquid-crystal displays

IEICE Transactions on Electronics

Volumn E80-C, Issue 2, 1997, Pages 320-325

  Kato, Kinya ^a   Wada, Tsutomu ^a,b   Kakuda, Nobuhiko ^a,c   Kawada, Tadamichi ^a,d  

^a NTT CORPORATION   (Japan)

^b Taikisha Co

^c NTT Advanced Technology Corporation   (Japan)

^d Applied Komatsu Technology   (Japan)

Author keywords

Active matrix; Aluminum based alloy film; Liquid crystal display

Indexed keywords

ALUMINUM ALLOYS; ELECTRIC CONDUCTIVITY OF SOLIDS; ETCHING; LIQUID CRYSTAL DISPLAYS; MAGNETIC FILMS; SPUTTER DEPOSITION;

HILLOCK FREE ALUMINUM BASED ALLOY BUS LINES;

CONDUCTIVE FILMS;

EID: 0031073117     PISSN: 09168524     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (5)

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