SCOPUS 정보 검색 플랫폼

Volumn 174-175, Issue , 2003, Pages 49-54

Model for power coupled to RF planar magnetrons. Experimental validation and application to CNx thin film deposition

Author keywords

Carbon nitride films; Modelling; Power coupling; RF planar magnetron

Indexed keywords

COATING TECHNIQUES; ELECTRONS; HIGH PRESSURE EFFECTS; MATHEMATICAL MODELS; THIN FILMS;

PLANAR MAGNETRONS;

MAGNETRONS;

COATING; INDUSTRIAL APPLICATION; PLASMA; SURFACE PROPERTY;

EID: 0041355541 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/S0257-8972(03)00621-2 Document Type: Article

Times cited : (5)

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