Simple model of power deposited into the plasma bulk of rf planar magnetrons

Plasma Sources Science and Technology

Volumn 12, Issue 1, 2003, Pages 97-106

  Minea, T M ^a   Bretagne J ^b  

^a INSTITUT DES MATÉRIAUX JEAN ROUXEL   (France)

^b UNIVERSITÉ PARIS SACLAY   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ASYMPTOTIC STABILITY; ELECTRONS; MAGNETIC FIELDS; MATHEMATICAL MODELS; PLASMAS; PRESSURE;

BULK ELECTRONS; OHMIC HEATING; POWER TRANSFER; RADIO FREQUENCY PLANAR MAGNETRONS;

MAGNETRONS;

EID: 0037293013     PISSN: 09630252     EISSN: None     Source Type: Journal    
DOI: 10.1088/0963-0252/12/1/313     Document Type: Article

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