Swift chemical sputtering of amorphous hydrogenated carbon

Physical Review B - Condensed Matter and Materials Physics

Volumn 63, Issue 19, 2001, Pages

  Salonen, E ^a   Nordlund, K ^a   Keinonen, J ^a   Wu, C H ^b  

^a UNIVERSITY OF HELSINKI   (Finland)

^b MAX PLANCK INSTITUT FÜR PLASMAPHYSIK   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON;

ARTICLE; DESORPTION; FINLAND; GERMANY; HYDROGENATION; MOLECULAR DYNAMICS; SURFACE PROPERTY;

EID: 0034900718     PISSN: 10980121     EISSN: 1550235X     Source Type: Journal    
DOI: 10.1103/PhysRevB.63.195415     Document Type: Article

References (62)

1. J.C. Angus and C.C. Hayman, Science 241, 913 (1988).
2. W. Jacob, Thin Solid Films 326, 1 (1998), and references therein.
3. W.S. Bacsa, J.S. Lannin, D.L. Pappas, and J.J. Cuomo, Phys. Rev. B 47, R10 931 (1993).
4. S. Sattel, J. Robertson, and Ehrhardt, J. Appl. Phys. 82, 4566 (1997).
5. D. Bourgoin, S. Turgeon, and G.G. Ross, Thin Solid Films 357, 246 (1999).
6. A. Annen and W. Jacob, Appl. Phys. Lett. 71, 1326 (1997).
7. J. Roth and C. Garcia-Rosales, Nucl. Fusion 36, 1647 (1996), and references therein.
8. B.V. Mech, A.A. Haasz, and J.W. Davis, J. Nucl. Mater. 255, 153 (1998).
9. A. Kallenbach, A. Thoma, A. Bard, K. Behringer, K. Schmidtmann, M. Weinclich, and the ASDEX upgrade team, Nucl. Fusion 38, 1097 (1998).
10. E. Salonen, K. Nordlund, J. Tarus, T. Ahlgren, J. Keinonen, and C.H. Wu, Phys. Rev. B 60, R14005 (1999).
11. E. Salonen, K. Nordlund, J. Keinonen, and C.H. Wu, Europhys. Lett. 52, 504 (2000).
12. J. Roth, in Sputtering by Particle Bombardment, edited by R. Behrisch (Springer, Berlin, 1981), Vol. I, pp. 91–146.
13. T. Tanabe, Phys. Scr. T64, 7 (1996).
14. J. Roth, B.M.U. Scherzer, R.S. Blewer, D.K. Brice, S.T. Picraux, and W.R. Wampler, J. Nucl. Mater. 93&94, 601 (1980).
15. B.L. Doyle, W.R. Wampler, and D.K. Brice, J. Nucl. Mater. 103 and 104, 513 (1981).
16. G. Federici and C.H. Wu, J. Nucl. Mater. 207, 62 (1993), and references therein.
17. T. Frauenheim, P. Blaudeck, U. Stephan, and G. Jungnickel, Phys. Rev. B 48, 4823 (1993).
18. G. Jungnickel, T. Frauenheim, D. Porezag, P. Blaudeck, U. Stephan, and R.J. Newport, Phys. Rev. B 50, 6709 (1994).
19. G. Galli, S. Iarlori, and O. Martini, Phys. Rev. B 49, 7060 (1994).
20. A. Horn, A. Schenk, J. Biener, B. Winter, C. Lutterloh, M. Wittman, and J. Küppers, Chem. Phys. Lett. 231, 193 (1994).
21. E. Vietzke, K. Flaskamp, and V. Philipps, J. Nucl. Mater. 111-112, 763 (1982).
22. A.A. Haasz, O. Auciello, P.C. Stangeby, and I.S. Youle, J. Nucl. Mater. 128-129, 593 (1984).
23. E. Vietzke, V. Philipps, and K. Flaskamp, J. Nucl. Mater. 162-164, 898 (1989).
24. E. Vietzke and A.A. Haasz, in Physical Processes of the Interaction of Fusion Plasmas with Solids, edited by W.O. Hofer and J. Roth (Academic Press, San Diego, 1996), Chap. 4.
25. J. Biener, U.A. Schubert, A. Schenk, B. Winter, C. Lutterloh, and J. Küppers, Adv. Mater. 5, 639 (1993).
26. J. Biener, U.A. Schubert, A. Schenk, B. Winter, C. Lutterloh, and J. Küppers, J. Chem. Phys. 99, 3125 (1993).
27. C. Lutterloh, A. Schenk, B. Winter, J. Biener, U.A. Schubert, and J. Küppers, Surf. Sci. 316, L1039 (1994).
28. E. Villa, J.A. Dagata, J. Horwitz, D. Squire, and M.C. Lin, J. Vac. Sci. Technol. A 8, 3237 (1990).
29. P. Sigmund, Mat. Fys. Medd. K. Dan. Vidensk. Selsk. 43, 7 (1993).
30. R.E. Johnson and J. Schou, Mat. Fys. Medd. K. Dan. Vidensk. Selsk. 43, 403 (1993).
31. B.V. Mech, A.A. Haasz, and J.W. Davis, J. Appl. Phys. 84, 1655 (1998).
32. C. García-Rosales, and J. Roth, J. Nucl. Mater. 196-198, 573 (1992).
33. J. Roth, J. Bohdansky, and K.L. Wilson, J. Nucl. Mater. 111-112, 775 (1982).
34. D.M. Goebel, J. Bohdansky, R.W. Conn, Y. Hirooka, W.K. Leung, R.E. Nygren, and G.R. Tynan, Fusion Technol. 15, 102 (1989).
35. B.J. Garrison and W.A. Goddard III, Phys. Rev. B 36, 9805 (1987).
36. T. A. Schoolcraft and B.J. Garrison, J. Am. Chem. Soc. 113, 8221 (1991).
37. H. Feil, J. Dieleman, and B.J. Garrison, J. Appl. Phys. 74, 1303 (1993).
38. M.E. Barone and D.B. Graves, J. Appl. Phys. 78, 6604 (1995).
39. M.E. Barone and D.B. Graves, J. Appl. Phys. 77, 1263 (1995).
40. K. Nordlund, Comput. Mater. Sci. 3, 448 (1995).
41. G. Gear, Numerical Initial Value Problems in Ordinary Differential Equations (Prentice-Hall, Englewood Cliffs, NJ, 1971).
42. W.H. Press, S.A. Teukolsky, W.T. Vetterling, and B.P. Flannery, Numerical Recipes in C; The Art of Scientific Computing, 2nd ed. (Cambridge University Press, New York, 1995).
43. H.J.C. Berendsen, J.P.M. Postma, W.F. van Gunsteren, A. DiNola, and J.R. Haak, J. Chem. Phys. 81, 3684 (1984).
44. D.W. Brenner, Phys. Rev. B 42, 9458 (1990).
45. K. Beardmore and R. Smith, Philos. Mag. A 74, 1439 (1996).
46. G.C. Abell, Phys. Rev. B 31, 6184 (1985).
47. J. Tersoff, Phys. Rev. B 37, 6991 (1988).
48. J. Tersoff, Phys. Rev. Lett. 61, 2879 (1988).
49. K. Nordlund, J. Keinonen, and T. Mattila, Phys. Rev. Lett. 77, 699 (1996).
50. J. Tersoff, Phys. Rev. B 39, 5566 (1989).
51. M.V.R. Murty and H.A. Atwater, Phys. Rev. B 51, 4889 (1995).
52. H.U. Jäger and M. Weiler, Diamond Relat. Mater. 7, 858 (1998).
53. W. Zhu, Z. Pan, Y. Ho, and Z. Man, Nucl. Instrum. Methods Phys. Res. B 153, 213 (1999).
54. R. Smith and K. Beardmore, Thin Solid Films 272, 255 (1996).
55. H.U. Jäger and K. Albe, J. Appl. Phys. 88, 1129 (2000).
56. J.P. Biersack and L.G. Haggmark, Nucl. Instrum. Methods 174, 257 (1980).
57. J.F. Ziegler (private communication).
58. E. Vietzke, K. Flaskamp, V. Philipps, G. Esser, P. Wienhold, and J. Winter, J. Nucl. Mater. 145-147, 443 (1987).
59. A.F. Voter, Phys. Rev. Lett. 78, 3908 (1997).
60. A.F. Voter and M.R. Sorensen, in Multiscale Modelling of Materials, edited by V. V. Bulatov et al., MRS Symposia Proceedings No. 538 (Materials Research Society, Pittsburgh, 1999), p. 427.
61. S.J. Stuart, A.B. Tutein, and J.A. Harrison, J. Chem. Phys. 112, 6472 (2000).
62. E. Salonen, K. Nordlund, J. Keinonen, and C. H. Wu (unpublished).