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Chemical Vapor Deposition

Volumn 6, Issue 4, 2000, Pages 206-214

Epitaxial silicon growth between scylla and charybdis

(4) Masi, Maurizio a Bertani, Valeria a Cavallotti, Carlo a Carrà, Sergio a

a POLITECNICO DI MILANO (Italy)

Author keywords

Epitaxy; Polycrystalline growth; Silicon; Surface morphology

Indexed keywords

EID: 0041118603 PISSN: 09481907 EISSN: None Source Type: Journal
DOI: 10.1002/1521-3862(200008)6:4<206::AID-CVDE206>3.0.CO;2-9 Document Type: Article

Times cited : (7)

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