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Volumn 152, Issue 3, 1988, Pages 611-618
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Limits of topographic measurement by the scanning tunnelling and atomic force microscopes
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Author keywords
AFM; amplitude; limits; measurement; metrology; microscope; profile; scanning; STM; surface; topography; wavelength
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Indexed keywords
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EID: 84986703649
PISSN: 00222720
EISSN: 13652818
Source Type: Journal
DOI: 10.1111/j.1365-2818.1988.tb01428.x Document Type: Article |
Times cited : (34)
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References (8)
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