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Volumn 152, Issue 3, 1988, Pages 611-618

Limits of topographic measurement by the scanning tunnelling and atomic force microscopes

Author keywords

AFM; amplitude; limits; measurement; metrology; microscope; profile; scanning; STM; surface; topography; wavelength

Indexed keywords


EID: 84986703649     PISSN: 00222720     EISSN: 13652818     Source Type: Journal    
DOI: 10.1111/j.1365-2818.1988.tb01428.x     Document Type: Article
Times cited : (34)

References (8)
  • 5
    • 0023384224 scopus 로고
    • Basis for comparing the performance of surface‐measuring machines
    • (1987) Precis. Eng. , vol.9 , pp. 149-152
    • Stedman, M.1
  • 6
    • 64949120270 scopus 로고
    • Mapping the performance of surface‐measuring instruments
    • (1987) Proc. SPIE. , vol.803 , pp. 138-142
    • Stedman, M.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.