Micromachined aperture probe tip for multifunctional scanning probe microscopy

Applied Physics Letters

Volumn 70, Issue 10, 1997, Pages 1236-1238

  Noell, W ^a   Abraham, M ^a   Mayr, K ^a   Ruf, A ^a   Barenz, J ^b   Hollricher, O ^b   Marti, O ^b   Guthner P ^c  

^a INSTITUT FÜR MIKROTECHNIK MAINZ GMBH   (Germany)

^b UNIVERSITY OF ULM   (Germany)

^c Omicron Vakuumphysik GmbH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001730287     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.118540     Document Type: Article

References (15)

1. D. W. Pohl, Thin Solid Films 264, 250 (1995).
2. A. Harootunian, E. Betzig, M. Isaacson, and A. Lewis, Appl. Phys. Lett. 49, 674 (1986).
3. M. Isaacson, J. A. Cline, and H. Barshatzky, J. Vac. Sci. Technol. B 9, 3103 (1991).
4. G. A. Valaskovic, M. Holton, and G. H. Morrison, Appl. Opt. 34, 1215 (1995).
5. G. Tarrach, M. A. Bopp, D. Zeisel, and A. J. Meixner, Rev. Sci. Instrum. 66, 3569 (1995).
6. A. J. Meixner, D. Zeisel, M. A. Bopp, and G. Tarrach, Opt. Eng. (Bellingham) 34, 2324 (1995).
7. B. Hecht, H. Bielefeld, L. Novotny, Y. Inouye, and D. W. Pohl, Phys. Rev. Lett. 77, 1889 (1996).
8. E. Betzig, P. L. Finn, and J. S. Weiner, Appl. Phys. Lett. 60, 2484 (1992).
9. T. Matsumoto and M. Ohtsu, Near Field Optics - 3, EOS Optical Meeting, 1995, Vol. 8, p. 107.
10. M. H. P. Moers, R. G. Tack, N. F. van Hulst, and B. Bölger, J. Appl. Phys. 75, 1254 (1994).
11. A. G. T. Ruiter, M. H. P. Moers, N. F. van Hulst, and M. de Boer, J. Vac. Sci. Technol. B 14, 597 (1996).
12. M. Radmacher, P. E. Hillner, and P. K. Hansma, Rev. Sci. Instrum. 65, 2737 (1994).
13. A. Ruf, Ph.D. dissertation, Technical University, Darmstadt, Germany, 1996, p. 67.
14. Test pattern provided by Topometrix GmbH, Darmstadt, Germany. It consists of round pads, which are 250 nm high and have a diameter of 1.9 μm.
15. A. J. Meixner, M. A. Bopp, and G. Tarrach, Appl. Opt. 34, 7995 (1995).