Selective thermal desorption of ultrathin aluminum oxide layers induced by electron beams

Applied Physics Letters

Volumn 79, Issue 6, 2001, Pages 842-844

  Kundu, Manisha ^a   Miyata, Noriyuki ^a   Ichikawa, Masakazu ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0039189865     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1391236     Document Type: Article

References (13)

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