Polarized off-axis Raman spectroscopy: A technique for measuring stress tensors in semiconductors

Journal of Applied Physics

Volumn 86, Issue 11, 1999, Pages 6164-6180

  Loechelt, G H ^a   Cave, N G ^b   Menendez J ^c  

^a MOTOROLA INC   (United States)

^b MOTOROLA INC   (United States)

^c ARIZONA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0039188221     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.371670     Document Type: Article

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