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Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 14, Issue 6, 1996, Pages 3896-3899

A proximity ion beam lithography process for high density nanostructures

(8) Wolfe, John C a Pendharkar, Sandeep V a Ruchhoeft, Paul a Sen, Sudipto a Morgan, Mark D b Horne, W E b Tiberio, R C c Randall, John N d

a UNIVERSITY OF HOUSTON (United States)

b EDTEK Inc (United States)

c Cornell University ^* (United States)

d TEXAS INSTRUMENTS (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000295247 PISSN: 10711023 EISSN: None Source Type: Journal
DOI: 10.1116/1.588689 Document Type: Article

Times cited : (27)

References (13)

1
- 0019636783
- L. Karapiperis, I. Adesida, C. A. Lee, and E. D. Wolf, J. Vac. Sci. Technol. 19, 1259 (1981).
- (1981) J. Vac. Sci. Technol. , vol.19 , pp. 1259
- Karapiperis, L.¹ Adesida, I.² Lee, C.A.³ Wolf, E.D.⁴

2
- 0344080002
- W. H. Brünger, L.-M. Buchmann, M. A. Torkler, and W. Finkelstein, J. Vac. Sci. Technol. B 12, 3547 (1994).
- (1994) J. Vac. Sci. Technol. B , vol.12 , pp. 3547
- Brünger, W.H.¹ Buchmann, L.-M.² Torkler, M.A.³ Finkelstein, W.⁴

3
- 5344265837
- S. W. Pang, T. M. Lyszczarz, C. L. Chen, J. P. Donnelly, and J. N. Randall, J. Vac. Sci. Technol. B 5, 215 (1987).
- (1987) J. Vac. Sci. Technol. B , vol.5 , pp. 215
- Pang, S.W.¹ Lyszczarz, T.M.² Chen, C.L.³ Donnelly, J.P.⁴ Randall, J.N.⁵

4
- 0003575116
- W. H. Brünger, L.-M. Buchmann, F. Naumann, D. Friedrich, W. Finkelstein, and R. Mohondro, J. Vac. Sci. Technol. B 13, 2561 (1995).
- (1995) J. Vac. Sci. Technol. B , vol.13 , pp. 2561
- Brünger, W.H.¹ Buchmann, L.-M.² Naumann, F.³ Friedrich, D.⁴ Finkelstein, W.⁵ Mohondro, R.⁶

5
- 0022593505
- J. N. Randall, L. A. Stern, and J. P. Donnelly, J. Vac. Sci. Technol. B 4, 201 (1986).
- (1986) J. Vac. Sci. Technol. B , vol.4 , pp. 201
- Randall, J.N.¹ Stern, L.A.² Donnelly, J.P.³

6
- 5344221352
- D. P. Stumbo and J. C. Wolfe, J. Vac. Sci. Technol. B 12, 3539 (1994).
- (1994) J. Vac. Sci. Technol. B , vol.12 , pp. 3539
- Stumbo, D.P.¹ Wolfe, J.C.²

7
- 0000956641
- S. V. Pendharkar et al., J. Vac. Sci. Technol. B 13, 2588 (1995).
- (1995) J. Vac. Sci. Technol. B , vol.13 , pp. 2588
- Pendharkar, S.V.¹

8
- 0343388790
- D. P. Stumbo et al., J. Vac. Sci. Technol. B 9, 2879 (1991).
- (1991) J. Vac. Sci. Technol. B , vol.9 , pp. 2879
- Stumbo, D.P.¹

9
- 5344239347
- these proceedings
- D. A. B. Miller, J. Vac. Sci. Technol. B, these proceedings.
- J. Vac. Sci. Technol. B
- Miller, D.A.B.¹

10
- 5344225189
- D. M. Byrne, A. J. Brouns, F. C. Case, R. C. Tiberio, B. L. Whitehead, and E. D. Wolf, J. Vac. Sci. Technol. B 3, 269 (1985).
- (1985) J. Vac. Sci. Technol. B , vol.3 , pp. 269
- Byrne, D.M.¹ Brouns, A.J.² Case, F.C.³ Tiberio, R.C.⁴ Whitehead, B.L.⁵ Wolf, E.D.⁶

11
- 5344223160
- these proceedings
- M. D. Morgan, W. E. Home, V. Sundaram, J. C. Wolfe, S. V. Pendharkar, and R. C. Tiberio, J. Vac. Sci. Technol. B, these proceedings.
- J. Vac. Sci. Technol. B
- Morgan, M.D.¹ Home, W.E.² Sundaram, V.³ Wolfe, J.C.⁴ Pendharkar, S.V.⁵ Tiberio, R.C.⁶

12
- 0000932036
- D. P. Stumbo, G. A. Damm, S. Sen, D. W. Engler, F-O. Fong, J. C. Wolfe, and James A. Oro, J. Vac. Sci. Technol. B 9, 3597 (1991).
- (1991) J. Vac. Sci. Technol. B , vol.9 , pp. 3597
- Stumbo, D.P.¹ Damm, G.A.² Sen, S.³ Engler, D.W.⁴ Fong, F.-O.⁵ Wolfe, J.C.⁶ Oro, J.A.⁷

13
- 0003412161
- Pergamon, New York
- H. H. Anderson and J. F. Ziegler, The Stopping and Ranges of Ions in Matter (Pergamon, New York, 1977), Vol. 3.
- (1977) The Stopping and Ranges of Ions in Matter , vol.3
- Anderson, H.H.¹ Ziegler, J.F.²

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