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Volumn 85, Issue 5, 1999, Pages 2652-2657

Pseudomorphic growth of ultrathin cubic 3C-SiC films on Si(100) by temperature programmed organometallic chemical vapor deposition

Author keywords

[No Author keywords available]

Indexed keywords


EID: 0001650068     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.369582     Document Type: Article
Times cited : (26)

References (32)
  • 1
    • 85034511069 scopus 로고    scopus 로고
    • note
    • 3C-SiC is a metastable polyform which is, however, kinetically preferred by the deposition at relatively low temperatures of ≤1400 °C. At temperatures which are needed for single crystal growth the hexagonal 6H-SiC and 4H-SiC polyforms are formed.
  • 10
    • 85034503277 scopus 로고    scopus 로고
    • EPICHEM Ltd., Power Road, Bromborough, Merseyside, L62 3QF, UK
    • EPICHEM Ltd., Power Road, Bromborough, Merseyside, L62 3QF, UK.
  • 25
    • 85034497056 scopus 로고    scopus 로고
    • Proc. European Mater. Res. Soc. Spring Meeting, Strasbourg 1997
    • in press
    • J. Hofmann and S. Veprek, Proc. European Mater. Res. Soc. Spring Meeting, Strasbourg 1997; Thin Solid Films (in press).
    • Thin Solid Films
    • Hofmann, J.1    Veprek, S.2
  • 32
    • 85034496740 scopus 로고    scopus 로고
    • note
    • In this filtering procedure one performs the Fourier transform of the micrograph 8(a) into the two-dimensional spectral space, in which one suppresses all frequencies corresponding to directions other than that parallel to the lattice planes which are running through the interface. The filtered image 8(b) is obtained by Fourier back transform into the real space.


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.