Continuously tunable air-gap micro-cavity devices for optical communication systems

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4871, Issue , 2002, Pages 145-159

  Daleiden, Jürgen ^a   Irmer, Sören ^a   Ataro, Edwin ^a   Prott, Cornelia ^a   Rangelov, Ventzeslav ^a   Römer, Friedhard ^a   Strassner, Martin ^b   Tarraf, Amer ^a   Hillmer, Hartmut ^a  

^a UNIVERSITY OF KASSEL   (Germany)

^b ROYAL INSTITUTE OF TECHNOLOGY   (Sweden)

Author keywords

Air gap; Micro cavity; MOEMS; Optical filter; Optical MEMS; Surface micromachining; Tuning; VCSEL

Indexed keywords

ABSORPTION; DIELECTRIC MATERIALS; MEMBRANES; MICROMACHINING; MIRRORS; OPTICAL FILTERS; REFRACTIVE INDEX; TUNING;

MICRO-CAVITY DEVICES;

OPTICAL COMMUNICATION;

EID: 0038756031     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.455562     Document Type: Conference Paper

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