Micromodification of silicon dioxide in a variable pressure/environmental scanning electron microscope

Applied Physics Letters

Volumn 79, Issue 19, 2001, Pages 3050-3052

  Stevens Kalceff, Marion A ^a  

^a UNIVERSITY OF NEW SOUTH WALES   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0038593573     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1415773     Document Type: Article

References (14)

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14. In the particular case of the ESEM, the bias applied ( - 30-+ 550 V) to a proprietary secondary electron detector can also enhance the field-induced effects described.