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Volumn 254, Issue 1-2, 2003, Pages 123-130
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On the growth of 4H-SiC by low-temperature liquid phase epitaxy in Al rich Al-Si melts
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Author keywords
A3. Liquid phase epitaxy; B1. Silicon carbide; B2. Semiconducting silicon compounds
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Indexed keywords
AGGLOMERATION;
ALUMINA;
COOLING;
LOW TEMPERATURE EFFECTS;
MELTING;
MORPHOLOGY;
SILICON CARBIDE;
WETTING;
CRYSTALLITES FORMATION;
LIQUID PHASE EPITAXY;
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EID: 0038515557
PISSN: 00220248
EISSN: None
Source Type: Journal
DOI: 10.1016/S0022-0248(03)01167-9 Document Type: Article |
Times cited : (29)
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References (15)
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