Mechanism of large oscillations of anodic potential during anodization of silicon in H3PO4/HF solutions

Materials Science and Engineering B: Solid-State Materials for Advanced Technology

Volumn 69, Issue , 2000, Pages 553-558

  Parkhutik, V ^a,b   Matveeva, E ^a,b   Perez, R ^a,b   Alamo, J ^a,b   Beltran D ^a,b  

^a UNIVERSITAT POLITÈCNICA DE VALÈNCIA   (Spain)

^b UNIVERSITY OF VALENCIA   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

CURRENT DENSITY; DAMPING; ELECTROCHEMISTRY; ELECTROLYTES; HYDROFLUORIC ACID; OSCILLATIONS; PHOSPHORIC ACID; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTING FILMS; THIN FILMS;

ELECTROCHEMICAL OSCILLATIONS;

SEMICONDUCTING SILICON;

EID: 0033896463     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0921-5107(99)00323-2     Document Type: Article

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