Interactions between plasma and ionization gauge in plasma immersion ion implantation

Surface and Coatings Technology

Volumn 169-170, Issue , 2003, Pages 36-40

  Tian, X B ^a   Fu, Ricky K Y ^a   Kwok, Dixon T K ^a   Chu, Paul K ^a  

^a CITY UNIVERSITY OF HONG KONG   (Hong Kong)

Author keywords

Glow discharge; Ion implantation; Plasma processing and deposition; Vacuum measurement

Indexed keywords

GLOW DISCHARGES; ION IMPLANTATION; IONIZATION; VACUUM;

IONIZATION GAUGES;

PLASMAS;

COATING; ION IMPLANTATION; PLASMA TREATMENT; SURFACE TREATMENT; VACUUM;

EID: 0038469934     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(03)00066-5     Document Type: Article

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