Fabrication of silicon nanostructured films by deposition of size-selected nanoparticles generated by pulsed laser ablation

Thin Solid Films

Volumn 437, Issue 1-2, 2003, Pages 230-234

  Seto, Takafumi ^a   Orii, Takaaki ^a   Hirasawa, Makoto ^a   Aya, Nobuhiro ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

Deposition process; Laser ablation; Nanostructures; Silicon

Indexed keywords

ELECTROSTATICS; FILMS; MICROSTRUCTURE; MORPHOLOGY; PARTICLE SIZE ANALYSIS; PULSED LASER DEPOSITION; SCANNING ELECTRON MICROSCOPY; SILICON;

DIFFERENTIAL MOBILITY ANALYZERS;

NANOSTRUCTURED MATERIALS;

EID: 0038447954     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(02)00732-0     Document Type: Article

References (19)

1. Canham L. Nature. 408:2000;411.
2. Tilke A.T., Simmel F.C., Blick R.H., Lorenz H., Kotthaus J.P. Prog. Quant. Elect. 25:2001;97.
3. Vlasov Y.A., Bo X.Z., Sturm J.C., Norris D.J. Nature. 414:2001;289.
4. Gourbilleau F., Portier X., Ternon C., Voivenel P., Madelon R., Rizk R. Appl. Phys. Lett. 78:2001;3058.
5. Li S.T., Germanenko I.N., El-Shall M.S. J. Cluster Sci. 10:1999;533.
6. Wan J.G., Han M., Zhou J., Wang G. Phys. Lett. A. 280:2001;357.
7. Makino T., Yamada Y., Suzuki N., Yoshida T., Onari S. J. Appl. Phys. 90:2001;5075.
8. Mavi H.S., Rasheed B.G., Soni R.K., Abbi S.C., Jain K.P. Thin Solid Films. 397:2001;125.
9. Kabashin A.V., Meunier M., Leonelli R. J. Vac. Technol. B. 19:2001;2217.
10. Park N.M., Choi C.J., Seong T.Y., Park S.J. Phys. Rev. Lett. 86:2001;1355.
11. Viera G., Huet S., Mikikian M., Boufendi L. Thin Sold Films. 403-404:2002;467.
12. Lowndes D.H., Rouleau C.M., Thundat T.G., Duscher G., Kenik E.A., Pennycook S.J. J. Mater. Res. 14:1999;359.
13. Marine W., Daniello J.M.S., Marfaing J. Appl. Sur. Sci. 46:1990;239.
14. Geohegan D.B., Puretzky A.A., Duscher G., Pennycook S.J. Appl. Phys. Lett. 72:1998;2987.
15. Ehbrecht M., Kohn B., Huisken F., Laguna M.A., Paillard V. Phys. Rev. B. 56:1997;6958.
16. Makino T., Suzuki N., Yamada Y., Yoshida Y., Seto T., Aya N. Appl. Phys. A. 69S:1999;243.
17. Seto T., Kawakami Y., Suzuki N., Hirasawa M., Aya N. Nanoletters. 1:2001;315.
18. Suzuki N., Makino T., Yamada Y., Yoshida T. Appl. Phys. Lett. 78:2001;2043.
19. Kabashin A.V., Sylvestre J.P., Patskovsky S., Meunier M. J. Appl. Phys. 91:2002;3248.