A dual-function leak detector for MEMS devices

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4980, Issue , 2003, Pages 301-308

  Jin, Y F ^a,b   Wang, Z P ^a   Wang, Z F ^a   Shi, X Q ^a   Lim, P C ^a   Miao, M ^b   Shan, X C ^a  

^a SINGAPORE INSTITUTE OF MANUFACTURING TECHNOLOGY   (Singapore)

^b PEKING UNIVERSITY   (China)

Author keywords

Diaphragm deflection; Helium bombing; Leak detector; Micro electro mechanical system (MEMS); Reliability

Indexed keywords

HELIUM; LASER APPLICATIONS; LEAK DETECTION; LIGHT INTERFERENCE;

LEAK DETECTORS;

MICROELECTROMECHANICAL DEVICES;

EID: 0038397292     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.472715     Document Type: Conference Paper

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