SCOPUS 정보 검색 플랫폼

Solid-State Electronics

Volumn 45, Issue 6, 2001, Pages 1003-1007

Fabrication and characterization of singly addressable arrays of polysilicon field-emission cathodes

(4) Chubun, N N a Chakhovskoi, A G a Hunt, C E a Hajra, M a

a University of California (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CURRENT VOLTAGE CHARACTERISTICS; DEPOSITION; ELECTRIC CONDUCTIVITY OF SOLIDS; ELECTRODES; FLAT PANEL DISPLAYS; GOLD; ION IMPLANTATION; METALLIC FILMS; MICROELECTROMECHANICAL DEVICES; MICROELECTRONICS; OXIDATION; POLYSILICON;

FOWLER-NORDHEIM EQUATION;

FIELD EMISSION CATHODES;

EID: 0035359994 PISSN: 00381101 EISSN: None Source Type: Journal
DOI: 10.1016/S0038-1101(01)00054-5 Document Type: Article

Times cited : (8)

References (6)

1
- 0000988556
- Low-voltage silicon gated field-emission cathodes for vacuum microelectronics and e-beam applications
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- Trujillo, J.T.¹ Hunt, C.E.²

2
- 0030359014
- A new fabrication method of silicon field emitter array with local oxidation of polysilicon and chemical-mechanical-polishing
- St. Petersburg, Russia, 7-12 July
- (1996) Proc of IVMC'99 , pp. 415-418
- Lee, J.H.¹ Kang, S.W.² Kim, S.G.³ Song, Y.H.⁴ Cho, K.I.⁵ Yoo, H.J.⁶

3
- 0000456435
- Polycrystalline silicon field emitters
- (1996) JVST B , vol.14 , Issue.3 , pp. 1910-1913
- Boswell, E.C.¹ Huq, S.E.² Huang, M.³ Prewett, P.D.⁴ Wilshaw, P.R.⁵

4
- 0001611596
- + polycrystalline silicon field emitter arrays for flat panel display applications
- (1997) JVST B , vol.15 , Issue.2 , pp. 472-476
- Uh, H.S.¹ Kwon, S.J.² Lee, J.D.³

5
- 0002369982
- High uniformity and low turn-on voltage Si FEAs fabricated with CMP
- Darmstadt, Germany, 6-9 July
- (1999) Proc IVMC'99 , pp. 370-371
- Ding, M.¹ Kim, H.² Akinwande, A.I.³

6
- 0029546334
- Low voltage silicon field emitters with gold gates
- Portland, OR, July 30-August 3
- (1995) Proc of the Eighth International Vacuum Microelectronics Conference , pp. 42-46
- Trujillo, J.T.¹ Chakhovskoi, A.G.² Hunt, C.E.³

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.