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Volumn 82, Issue 20, 2003, Pages 3469-3471

Fluorine-enhanced boron diffusion in amorphous silicon

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHIZATION; AMORPHOUS SILICON; BORON; DIFFUSION; FLUORINE;

PREAMORPHIZATION;

SILICON WAFERS;

EID: 0038319082 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.1576508 Document Type: Article

Times cited : (40)

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