Development of EUV point diffraction interferometry using the NewSUBARU undulator radiation

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4782, Issue , 2002, Pages 204-211

  Niibe, Masahito ^a   Mukai, Mikihito ^a   Tanaka, Takeshi ^a   Sugisaki, Katsumi ^b   Zhu, Yucong ^b   Gomei, Yoshio ^b  

^a UNIVERSITY OF HYOGO   (Japan)

^b ASSOCIATION OF SUPER ADVANCED ELECTRONICS TECHNOLOGIES ASET   (Japan)

Author keywords

Beam line; EUV; Multilayer mirror; Point diffraction interferometer; Undulator; Wave front error

Indexed keywords

INTERFEROMETRY; LIGHT INTERFERENCE; MIRRORS; MONOCHROMATORS; PHASE SHIFT; ULTRAVIOLET RADIATION;

POINT DIFFRACTION INTERFEROMETER;

WAVEFRONTS;

EID: 0038302680     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.451354     Document Type: Conference Paper

References (8)

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