Present status of the ASET at-wavelength phase-shifting point diffraction interferometer

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4146, Issue 1, 2000, Pages 47-53

  Sugisaki, Katsumi ^a   Zhu, Yucong ^a   Gomei, Yoshio ^a   Niibe, Masahito ^b   Watanabe, Takeo ^b   Kinoshita, Hiroo ^b  

^a EUV Lithography Laboratory   (Japan)

^b UNIVERSITY OF HYOGO   (Japan)

Author keywords

EUV lithography; Interferometry; Optical testing; Phase shifting point diffraction interferometer

Indexed keywords

DIFFRACTION; IMAGING SYSTEMS; LITHOGRAPHY; PHASE SHIFT; ULTRAVIOLET RADIATION; WAVEFRONTS;

SCHWARZSCHILD OPTICS;

INTERFEROMETERS;

EID: 0034498794     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.406675     Document Type: Article

References (0)