Strained-Si-on-insulator (SSOI) and SiGe-on-insulator (SGOI): Fabrication obstacles and solutions

Materials Research Society Symposium - Proceedings

Volumn 745, Issue , 2002, Pages 105-110

  Taraschi, Gianni ^a   Pitera, Arthur J ^a   McGill, Lisa M ^a   Cheng, Zhi Yuan ^a   Lee, Minjoo L ^a   Langdo, Thomas A ^a   Fitzgerald, Eugene A ^a  

^a Massachusetts Institute of Technology Cambridge   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BONDING; CARRIER MOBILITY; CMOS INTEGRATED CIRCUITS; DELAMINATION; ETCHING; ION IMPLANTATION; SILICON WAFERS; TRANSMISSION ELECTRON MICROSCOPY; ULTRATHIN FILMS;

METASTABLE LAYERS; STRAINED SEMICONDUCTORS;

SILICON ON INSULATOR TECHNOLOGY;

EID: 0038293341     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-745-n4.7     Document Type: Conference Paper

References (7)

1. Ishikawa, Y., N. Shibata and S. Fukatsu, Thin Solid Films 369, 213-16 (2000).
2. Tezuka, T., N. Sugiyama, S. Takagi and T. Kawakubo, Applied Physics Letters 80, 3560-2 (2002).
3. Cheng, Z.-Y., M. T. Currie, C. W. Leitz, G. Taraschi, E. A. Fitzgerald, J. L. Hoyt and D. A. Antoniadas, IEEE Electron Device Letters 22, 321-3 (2001).
4. Huang, L. J., J. O. Chu, D. F. Canaperi, C. P. D'Emic, R. M. Anderson, S. J. Koester and H. S. Wong, Applied Physics Letters 78, 1267-9 (2001).
5. Taraschi, G., T. A. Langdo, M. T. Currie, E. A. Fitzgerald and D. A. Antoniadis, Journal of Vacuum Science & Technology B 20, 725-7 (2002).
6. Taraschi, G., Z.-Y. Cheng, M. T. Currie, C. W, Leitz, T. A. Langdo, M. L. Lee, A. Pitera, E. A. Fitzgerald, D. A. Antoniadis and J. L. Hoyt, Proceedings of Tenth International Symposium on SOI Technology and Devices, 27-32 (2001).
7. Langdo, T. A., A. Lochtefeld, M. T. Currie, R. Hammond, V. K. Yang, J. A. Carlin, C. J. Vineis, G. Braithwaite, H. Badawi, M. T. Bulsara and E. A. Fitzgerald, Preparation of novel SiGe-free strained Si on insulator substrates, 2002 IEEE International SOI Conference (SOI). Williamsburg, Virginia., IEEE (2002).